Mems/Nems: (1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS (v. 1)
Cornelius T. Leondes
As miniaturization, batch fabrication, and integrated electronics rapidly enable the development of a broad range of smart products, MEMs, MEOMS, and NEMS are creating enormous opportunities for commerce and functionality. The MEMS/NEMS Handbook (Microelectromechanical Systems/Nanoelectromechanical Systems) covers all of the major topics within the subject including design methods, fabrication techniques, manufacturing methods, sensors and actuators, and Micro Optical Electro Mechanical Systems. The many applications of MEMS technology include computer devices, electronics, instrumentation, industrial process control, biotechnology, medicine, chemical systems, office equipment, and communications. More than 100 co-authors from nearly 20 countries present clearly written, self-contained, accessible and comprehensive contributions with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Categorie:
Anno:
2006
Casa editrice:
Springer
Lingua:
english
Pagine:
2000
ISBN 10:
0387257861
ISBN 13:
9780387257860
ISBN:
9780387245202
File:
PDF, 44.34 MB
IPFS:
,
english, 2006